The UHP Slit Valve Door is an engineered sealing system designed to improve productivity and reduce downtime in critical semiconductor processing applications. Developed in cooperation with a leading semiconductor OEM, the UHP Slit Valve Door consists of a sealing element chemically bonded to an aluminum or stainless steel door. This sealing element typically consists of chemical-resistant, thermally stable Parofluor (perfluorinated FFKM) or fluorocarbon (FKM) compounds. The integrated door and seal system is processed and packaged in an ultra-high purity manufacturing cell.
Unlike an o-ring that is stretched around groove corners, the UHP Slit Valve Door sealing element is molded in place. This process eliminates stresses in the sealing material that are a common cause of failure in o-ring type seals. In applications characterized by a combination of high temperatures and harsh chemicals, an o-ring seal can expand and become “pinched” in a dovetail groove. This pinching can result in seal failure, particle generation and loss of productivity. The UHP Slit Valve Door’s innovative design eliminates pinching and other problems related to thermal stability and chemical resistance. It also prolongs seal life and promotes increased equipment productivity.
The UHP Slit Valve Door’s one-piece design reduces downtime by eliminating the need for labor-intensive preparation of the gland and replacement of a conventional seal into a dovetail groove. It also ensures proper seal installation and orientation.
Advanced perfluoroelastomer bonding technology is employed in the manufacture of the UHP Slit Valve Door. The superior stability of the bond between door and sealing element provides improved abrasion resistance and seal integrity that result in extremely low particle generation and dramatically increased seal service life.